Basic Info.
Model NO.
INCP003
Process
Porcelain Ceramic Plate
Pores Diameter
1-5, 15, 30, 40, 50, 100μm, Customized
Color
White, Grey, Brown
Density
2.3-2.5g/cm3
Compressive Strength
≥600
Porosity
40%
Porous Ceramics Application
Vacuum Chuck
Advantage
Corrosion Resistance, Have Pore Size
Hardness (Hra)
≥50
Al2O3
≥80%
Flexural Strength
40MPa
Operating Pressure
≤10 MPa
Acid Resistance
≤10.0 Mg/Cm2
Alkali Resistance
≤20.0 Mg/Cm2
Transport Package
Carton Package
Specification
Customized
Trademark
Innovacera
Origin
Fujian, China
Production Capacity
100000 Piece/Pieces Per Month
Product Description
Alumina Al2o3 Porous Ceramic Disc for Vacuum Chuck is composed by the distributed evenly open pores which is
interconnected by shape likearch , when the fluid through these pores,the suspended matter, colloidal particles, organic
molecules are trapped, adsorbed inside the micropores,then track to achieve the purification and filtration homogenizing
effect.The porous ceramic has the advatage with high strength,wear resistance, high temperature, corrosion, pollution, porosity
distribution, long service life and easy to regenerate, which is particularly suitable for a variety of gas, liquid filtration and fluidized
process.
Main Application field:
- New and refurbished alumina porous ceramic chucks for Disco, K & S, Applied materials TSK, Micro Automation, Load Point, etc
dicing saws and grinders.
- 4", 6", 8," 12″are regular sizes, And pore size include 15um, 30um, 50um, 100um.
Materials are alumina (Color: white, light brown, dark brown, blue-gray).
- Custom size (like square, oval shape, or irregular shapes) is available for us.
Specifically tailored techniques include:
• Spraying
• Brushing
• Backwashing
• Oven firing
• Dilute acid cleaning
• Solvent cleaning plus steam
• Ultrasonic cleaning
• Spraying
• Brushing
• Backwashing
• Oven firing
• Dilute acid cleaning
• Solvent cleaning plus steam
• Ultrasonic cleaning
Characteristics include:
High flatness and parallelism Compact and uniform microstructure with high strength Good permeability and uniform adsorption
affinity Long life time dressing easily.
affinity Long life time dressing easily.
Applications
• Used in tough applications to replace porous metal or as an
alternative to plastic or fabric media
• Cleaned and reused using a variety of methods depending
on the contaminant to be removed
• Filters for gases and liquids
• Capillary Electrophoresis
• Filtration for heavy metal ions (Cr, Ni etc) in water
• High temperature chemical support for gas absorption
• High efficiency flow through catalytic supports
• Gas burners
• Chromatography
• Micro trapping systems and bio-catalytic supports
• Vacuum holding plates (vacuum chunk)
• Nano-membrane supports for sensor applications
• Micro-bubble diffusers
• Fine or micro channels for electrophoresis
• Chemical or bio reactor
• Used in tough applications to replace porous metal or as an
alternative to plastic or fabric media
• Cleaned and reused using a variety of methods depending
on the contaminant to be removed
• Filters for gases and liquids
• Capillary Electrophoresis
• Filtration for heavy metal ions (Cr, Ni etc) in water
• High temperature chemical support for gas absorption
• High efficiency flow through catalytic supports
• Gas burners
• Chromatography
• Micro trapping systems and bio-catalytic supports
• Vacuum holding plates (vacuum chunk)
• Nano-membrane supports for sensor applications
• Micro-bubble diffusers
• Fine or micro channels for electrophoresis
• Chemical or bio reactor
The Detailed Regular Size as Below
---
| Regular size | 6, 8, 12 inches | |
| Diameter Regular Tolerance | +/-0.10 mm | |
| Regular Flatness | +/-0.10 mm | |
| Regular Surface Roughness | Ra 0.8-1.6 | |
| Alumina (Al2O3) | Pore Size | Color |
| 15 um | Light Brown | |
| 30 um | Brown | |
| 50 um | Blue-Gray | |
| 100 um | Blue-Gray | |
Alumina materials properties
---
| Properties | Unit | Pore Ceramic |
| Al2O3 Content | wt% | ≥ 80 |
| SiO2 Content | wt% | 16-18 |
| Density | g /cm3 | 2.3-2.5 |
| Hardness (HRA) | HRA ≥ | 50 |
| Flexure strength | MPa ≥ | 40 |
| Compressive Strength | MPa≥ | 600 |
| Porosity Factor | % | 40 |
| Work Pressure | MPa ≤ | 10 |
| Acid Resistance | mg/cm2 ≤ | 10 |
| Alkali Resistance | mg/cm2 ≤ | 20 |
